Estimation of the field induced damage thresholds in reticles
نویسنده
چکیده
It has been reported previously that three separate processes cause damage when an electric field interacts with a reticle; electrostatic discharge (ESD) and two different types of electric field-induced metal migration (EFM). This paper presents some further data analysis allowing a first-order calibration of the thresholds for these different forms of field induced reticle damage. EFM is shown to take place with gap voltages within the reticle pattern that are more than an order of magnitude below that which results in ESD damage. The effect of reticle layout on the predicted sensitivity to different types of field-induced damage is also explored.
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